White-light interferometer without mechanical scanning
نویسندگان
چکیده
منابع مشابه
Performance evaluation of a vibration desensitized scanning white light interferometer
Surface metrology instruments normally require thermal, seismic and acoustic isolation. Shop-floor metrology solutions offer reduced cost and process time. If they operate on the same principles as laboratory devices, an inherent sensitivity to vibration remains. This paper describes a methodology for evaluating ‘environmental tolerance’ and applying it to characterize a recently introduced ‘en...
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ژورنال
عنوان ژورنال: Optics and Lasers in Engineering
سال: 2020
ISSN: 0143-8166
DOI: 10.1016/j.optlaseng.2019.105800